Thermal insulating rings (application of ceramic fiber)

This product was developed as a high temperature thermal insulation such as in diffusion furnace and CVD equipment used in semiconductor manufacturing processes.
Used for semiconductor manufacturing equipment, diffusion furnace and other high temperature insulation materials.

Advantages

  • ・This ring can be produced to match the shape of the quartz tube and silicon carbide tube loaded in the furnace.
  • ・Compared to silica wool and silica insulation, this material has high thermal resistance, excellent sealing characteristics and does not react with the quartz tube.
  • ・Since alumina fiber is used, it features longer service life than silica fiber enabling reduction of insulation replacement frequency and wastes generated.
  • ・Customers can select between low impurity and normal types as requested.
    ※The low impurity type uses low impurity materials in the outer materials, inner filler and sewing thread.
  • ・Thermal insulating rings have thermal resistance of 1200℃.
  • ・We recommend reed-shaped filler with to avoid particle generation in locations that had been filled with silica wool.
  • ・To prevent smoke issues after installation, all products are provided after baking.

Materials composition of Thermal Insulating Ring

low impurities type general type
outer materials Almax B cloth HG-3025-T
Almax B cloth HG-4018-D (thick)
Almax B cloth 3025-T
Almax B cloth 4018-D (thick)
inner filler Ceramics fiber blanket
Ceramics fiber board
Ceramics fiber board (hardened type)
Ceramics fiber blanket
Ceramics fiber board
Ceramics fiber board (hardened type)
sweing thread Almax B HG-T-5760D Almax B T-5760D
binding string Almax B sleeve HG-SV-4 Almax B sleeve SV-4

Almax B (ceramic fiber)

Appropriate for use in fields of cutting edge technology such as fuel cell batteries due to its thermal resistance and insulation.
We have 5 kinds of shapes available.

Almax B (low impurities) Almax B
crystal phase δ-Alumina δ-Alumina
chemical composition Al2O3 72% 72%
SiO2 28% 28%
fiber diameter (μm) 7 7
bulk density (g/cm3) 2.9 2.9
thermal resistance (℃) 1200 1200
features low-impurity high mechanical strength/good machinability
minor component (ppm) Fe 258 630
Na 18 1100
Ca <1 180
P <2 <100
Cu 4 65
K <1 100
form
  • yarn,
  • cloth,
  • sleeve,
  • tape and felt (Almax B only)

Back to Top