Air stage
With our excellent design, production and evaluation technologies built on our vast manufacturing experience, we achieve high-speed, high-precision positioning with excellent reproducibility.
Features
- ・Non-contact so wear resistance is extremely low enabling high-speed, high-precision positioning.
- ・Averaged results prevent impact by guide/table surface and grant high straightness.
- ・High reproducibility
- ・The non-contact support give products a long, maintenance-free service life of clean operation without generating dusts.
Example products
NEXCERA™ air stages
- Reduced thermal drift
- Using the ultra-low thermal expansion NEXCERA™ materials enables proper operation even under the influence of heat sources such as linear motors and sensors.
- Excellent repeated operation precision
- The highly precise machining achieves excellent straightness and stable repetition.
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Yawing (with vacuum type linear) -
Vacuum preloading type -
Pitching (with vacuum type linear)
| Stage size | mm | 410×300×158 | |
|---|---|---|---|
| Control stroke | mm | 100 | |
| Air supply pressure | MPa | 0.4 | |
| Vacuum pressure | kPa | 65 | |
| Operation straightness | nm/100mm | Yawing | 13 |
| Pitching | 9 | ||
| Bearing stiffness | N/μm | Horizontal direction | 350 |
| Vertical direction | 200 |
* The data indicated herein is representative values and not guaranteed values.
