With our excellent design, production and evaluation technologies built on our vast manufacturing experience, we achieve high-speed, high-precision positioning with excellent reproducibility.
- ・Non-contact so wear resistance is extremely low enabling high-speed, high-precision positioning.
- ・Averaged results prevent impact by guide/table surface and grant high straightness.
- ・High reproducibility
- ・The non-contact support give products a long, maintenance-free service life of clean operation without generating dusts.
NEXCERA™ air stages
- Reduced thermal drift
- Using the ultra-low thermal expansion NEXCERA™ materials enables proper operation even under the influence of heat sources such as linear motors and sensors.
- Excellent repeated operation precision
- The highly precise machining achieves excellent straightness and stable repetition.
Yawing (with vacuum type linear)
Vacuum preloading type
Pitching (with vacuum type linear)
|Air supply pressure||MPa||0.4|
|Bearing stiffness||N/μm||Horizontal direction||350|
* The data indicated herein is representative values and not guaranteed values.