Aluminum nitride (AlN)
Features
- ①High thermal conductivity
- ②Heat shock resistance
- ③Thermal expansion coefficient similar to silicon wafer
Characteristics
| Code | MAN-090 | MAN-170 | MAN-230 | |
|---|---|---|---|---|
| Color | grey | grey | grey | |
| Bulk Density | g/cm3 | 3.20 | 3.20 | 3.30 |
| Flexural Strength | MPa | 350 | 350 | 350 |
| Compressive Strength | MPa | - | 3000 | - |
| Young's Modulus | GPa | - | 320 | - |
| Poisson's Ratio | - | - | 0.27 | - |
| Hardness | GPa | - | 14 | - |
| Fracture Toughness | MPa・m1/2 | - | - | - |
| Electrical Resistivity (RT) | Ω・cm | >1015 | >1015 | >1015 |
| Thermal Expansion Coefficient (RT) | ×10-6/℃ | - | - | - |
| Thermal Conductivity (RT) | W/(m・K) | 90 | 170 | 230 |
| Specific Heat (RT) | J/(g・K) | - | 0.7 | - |
| Thermal Shock Resistance ⊿T | ℃ | - | 400 | - |
| Properties | Sintering additive-less for plasma resistance | Normal product | High thermal conductivity |
* The data indicated herein is representative values and not guaranteed values.
