Fine ceramics
By Material
- LovTEC
- Low Volume-scattering Technical Ceramics
- Low volume-scattering ceramics for optical measurement / inspection applications
- NEXCERA®
- NEXCERA® is a ultra-low thermal expansion ceramic with a cordierite (2MgO-2Al2O3-5SiO2) base. It is characterized by demonstrating the zero expansion at near room temperatures, and has higher strength and toughness than low thermal expansion glass. This enables applications in designs more complicated than could be achieved previously.
- Sialon
- Silicon nitride type ceramics have high strength as high temperatures and 1/10 of the thermal expansion of iron at room temperature.
- Product overview
- Silicon carbide
- In addition to light weight and high stiffness, this material demonstrates high creep resistance and has high thermal conductivity with electrical conduction.
- Product overview
- Boron carbide
- High hardness approaching that of diamond or c-BN. This material also has extremely high toughness and high wear resistance.
- Product overview
- Aluminum nitride
- With excellent thermal conductivity, heat shock resistance and electrical insulation, this material has thermal expansion similar to silicon.
- Product overview
- Alumina
- A very well balanced generic high purity material with strength, electrical insulation and wear resistance.
- Product overview
- Zirconia
- The highest toughness of all ceramics the wear resistance of a highly strong material.
- Product overview
- L-TEX
- This material has low thermal expansion, low thermal conduction and is strong against thermal shock as well.
- Product overview
- Macerite series
- These ceramics feature excellent machinability. Well suited to production of various kinds in small lots, this material is able to support rapid delivery for test or R&D components.
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- Lineup
- Macerite ET
- Macerite SP
- Macerite HSP
- Macerite PN
- Macerite CE
- Product overview
- Boron nitride type, Aluminum nitride type, Porous
- We supply a wide array of machinable ceramics including Non-oxide ceramics such as boron nitride.
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- Lineup
- BN N-1
- BN HC
- SBN
- SHAPAL Hi Msoft
- MACHINAX
- ALMATITE
- Product overview
Application Products
- Measurement equipment standards using the dimensional stability of NEXCERA®.
- NEXCERA® can be given a mirror finish. It features low thermal expansion and high aging and thermal stability making it well suited to optical mirror applications.
- Our fine ceramic electrostatic chucks are made with our unique materials and machining technology.
- Porous ceramic chucking plates using vacuum chucking for materials such as wafers and thin films.
- High precision hole diameter and hole position treatment for machinable ceramics as parts for semiconductor inspection devices.
- Air stage structure design, production and functional inspection based on our wealth of experience.
- We have a lineup of various ceramics materials for calibrating ultrasound probes.
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Standards -
Optical mirrors -
Vacuum chuck -
Electrostatic chuck
